1. State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, People's Republic of China
2. School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, People's Republic of China
3. Department of Mechanical Engineering, University of Colorado, Boulder, CO, USA
4. CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Modern Mechanics, University of Science and Technology of China, Hefei, Anhui Province, People's Republic of China
5. The Affiliated High School of Peking University, Beijing, People's Republic of China
6. Department of Precision Instrument, Tsinghua University, Beijing, People's Republic of China