Improved route to a diphenoxide-based precursor for chemical vapour deposition of parylene AF-4-Reference-Cited by-同舟云学术

Improved route to a diphenoxide-based precursor for chemical vapour deposition of parylene AF-4

Published:2021-04 Issue:4 Volume:8 Page:
ISSN:2054-5703
Container-title:Royal Society Open Science
language:en
Short-container-title:R. Soc. open sci.

Author:

Kast Daniel¹^ORCID,Franz Gerhard¹^ORCID,Senkevich Jay J.²

Affiliation:

1. Department of Applied Sciences and Mechatronics, Munich University of Applied Sciences, München, Germany

2. Massachusetts Institute of Technology, Cambridge, MA, USA

Abstract

In this work, we present the synthesis of an alternative precursor for chemical vapour deposition of parylene AF-4 to the widely used standard, octafluoro[2.2]paracyclophane. The standard precursor suffers from uncertainties in its supply chain and its synthesis is of low yield. A comparison between different reaction parameters and solvents is drawn by means of thermal, laboratory-scale and microwave-assisted reactions and quantitative nuclear magnetic resonance (qNMR) studies.

Funder

Staff unit centre for research promotion of the university of applied sciences Munich

Bundesministerium für Bildung und Forschung

Publisher

The Royal Society

Subject

Multidisciplinary

Link

https://royalsocietypublishing.org/doi/pdf/10.1098/rsos.201921

Reference20 articles.

1. Itoh K, Lee T, Sakurai T, Schmitt-Landsiedel D, Ho PS, Leu JJ, Lee WW. 2003 Low dielectric constant materials for IC applications, vol. 9. Berlin, Heidelberg: Springer.

2. Thermal decomposition of poly(α,α,α′,α′-tetrafluoro-p-xylylene) in nitrogen and oxygen

3. Novel fluoropolymers formed by an unprecedented SRN1 condensation polymerization mechanism

4. A New, General Synthetic Method for the Preparation of Linear Poly-p-xylylenes

5. Stability of CVD-Produced Polymer Thin Films

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Chemical Vapor Deposition of Longitudinal Homogeneous Parylene Thin-Films inside Narrow Tubes;Processes;2022-10-01