Ion–assisted sputter deposition
Author:
Affiliation:
1. Surface Coatings Laboratory, Department of Chemistry and Materials, Manchester Metropolitan University, Manchester M1 5GD, UK
Publisher
The Royal Society
Subject
General Physics and Astronomy,General Engineering,General Mathematics
Link
https://royalsocietypublishing.org/doi/pdf/10.1098/rsta.2003.1303
Reference59 articles.
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3. Optimization of parameters for dynamic recoil mixing of gold films deposited on silicon
4. The deposition of highly supersaturated metastable aluminium-magnesium alloys by unbalanced magnetron sputtering from composite targets
5. Aluminium-magnesium alloys as corrosion resistant coatings for steel
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