Observation of the adhesion of thin Ta polycrystalline films to Si wafers via in situtopography/radiography
Author:
Affiliation:
1. Center for Nanomaterials Science, Department of Materials Science and Engineering, The University of Michigan, Ann Arbor, MI 48109, USA
2. Stanford Synchrotron Radiation Laboratory, Stanford University, CA 94309, USA
Publisher
The Royal Society
Subject
General Physics and Astronomy,General Engineering,General Mathematics
Link
https://royalsocietypublishing.org/doi/pdf/10.1098/rsta.1999.0457
Reference13 articles.
1. Synchrotron radiation Bragg angle contour mapping of crack nucleation at grain boundaries
2. Bowen D. K. 1998 High resolution X-ray diffractometry and topography. London: Taylor & Francis.
3. Repeated compressive stress increase with 400 °C thermal cycling in tantalum thin films due to increases in the oxygen content
4. Applications of synchrotron radiation topography to dynamic processes in single crystal materials
5. Mixed Mode Cracking in Layered Materials
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