Thermal Stability of Ultralow-k Dielectric Multi-Layer Films
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Published:2013-02-01
Issue:2
Volume:5
Page:282-285
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ISSN:1941-4900
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Container-title:Nanoscience and Nanotechnology Letters
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language:en
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Short-container-title:Nanosci Nanotechnol Lett
Author:
Tian Miao,Sun Zhaoyuan,Li Jianchen
Publisher
American Scientific Publishers
Subject
General Materials Science