Cutting Behavior Simulation of a Chemical Mechanical Polishing Particle Using a Three-Dimensional Transient Atomistic FE Model with Nonlinear Spring-Damping Elements
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Published:2013-10-01
Issue:10
Volume:5
Page:1035-1043
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ISSN:1941-4900
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Container-title:Nanoscience and Nanotechnology Letters
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language:en
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Short-container-title:Nanosci Nanotechnol Lett
Author:
Chiu Jinn-Tong,Lin Yeou-Yih
Publisher
American Scientific Publishers
Subject
General Materials Science