A New Mold Structure to Replicate Patterns Over 1 μm in Depth for Substrate Conformal Imprint Lithography
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Published:2013-12-01
Issue:12
Volume:13
Page:8036-8040
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j. nanosci. nanotech.
Author:
Kim Geehong,Jeong Mira,Park HyunHa,Lim HyungJun,Lee JaeJong,Choi KeeBong
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering