Room Temperature Deposition of Silicon Nanodot Clusters by Plasma-Enhanced Chemical Vapor Deposition
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Published:2013-10-01
Issue:10
Volume:13
Page:7173-7176
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j. nanosci. nanotech.
Author:
Kim Jae-Kwan,Kim Jun Young,Yoon Jae-Sik,Lee Ji-Myon
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering