Optimization of Tungsten Dual Poly-Metal Gates in Memory Devices with Ti/WN/WSiN Barrier Metal
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Published:2013-09-01
Issue:9
Volume:13
Page:6455-6458
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j. nanosci. nanotech.
Author:
Sung Min-Gyu,Park Sung-Ki,Ali Ahmed I.,Kim Yong Soo
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering