Variation in the Nanostructural Features of nc-Si:H Films with Radio Frequency Power Conditions
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Published:2013-02-01
Issue:2
Volume:13
Page:898-903
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j. nanosci. nanotech.
Author:
Son Jong-Ick,Nam Hee-Jong,Cho Nam-Hee
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering