Electrical and Mechanical Characteristics of Room Temperature Deposited Silicon Nitride Using Two Inner Parallel Cylindrical Coils Inductively Coupled Plasma Chemical Vapor Deposition
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Published:2013-09-01
Issue:9
Volume:13
Page:6326-6332
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j. nanosci. nanotech.
Author:
Kang Sungchil,Lee Hyun Woo,Hong Mun Pyo,Kwon Kwang-Ho
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering