Enhancement of Co Nucleation on the TaNx Film Surface in Co MOCVD
-
Published:2013-10-01
Issue:10
Volume:13
Page:7142-7144
-
ISSN:1533-4880
-
Container-title:Journal of Nanoscience and Nanotechnology
-
language:en
-
Short-container-title:j. nanosci. nanotech.
Author:
Park Jae-Hyung,Moon Dae-Yong,Han Dong-Suk,Shin So-Ra,Park Jong-Wan
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering