Monitoring of Surface Roughness of Plasma-Deposited Films Using Optical Microscopy-Measured Dark Particle Distributions
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Published:2014-10-01
Issue:10
Volume:14
Page:7632-7635
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j nanosci nanotechnol
Author:
Kim Byungwhan,Seo Junhyun,Jung Donghwa
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering