Characteristics of Metal–Metal Nano-Area Contact Resistance for Less Than 5 nm Technology Node-Reference-Cited by-同舟云学术

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Characteristics of Metal–Metal Nano-Area Contact Resistance for Less Than 5 nm Technology Node

Published:2020-01-01 Issue:1 Volume:20 Page:643-646
ISSN:1533-4880
Container-title:Journal of Nanoscience and Nanotechnology
language:en
Short-container-title:j nanosci nanotechnol

Author:

Choi Eunmi¹,Cui Yinhua¹,Gao Yuan¹,Hahn Sang June²,Yun Ju-Young³,Huh Hoon⁴,Pyo Sung Gyu¹

Affiliation:

1. School of Integrative Engineering, Chung-Ang University, Seoul, 06974, Korea

2. Department of Physics, Chung-Ang University, Seoul 156-756, Korea

3. Korea Research Institute of Standards and Science-Center for Materials & Energy Measurement Division of Industrial Metrologyn, 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea

4. Thermochemical Energy System R&BD Group, Korea Institute of Industrial Technology, Chungnam 331-822, Korea

Publisher

American Scientific Publishers

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering

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