Processing Characteristics and Parametric Effects on Picosecond Laser Nanoscaled Patterning of Poly(methyl methacrylate)-Reference-Cited by-同舟云学术

Processing Characteristics and Parametric Effects on Picosecond Laser Nanoscaled Patterning of Poly(methyl methacrylate)

Published:2020-08-01 Issue:8 Volume:20 Page:5142-5146
ISSN:1533-4880
Container-title:Journal of Nanoscience and Nanotechnology
language:en
Short-container-title:j nanosci nanotechnol

Author:

Ho Ching-Yen¹,Liu Zui-Wei²,Chen Xian-Liang²,Qiao Dongkai¹,Xiong Chang-Wei²,Chen Bor-Chyuan³,Chiou Yu-Jia⁴

Affiliation:

1. School of Mechanical and Electrical Engineering, Guangdong University of Petrochemical Technology, Maoming 525000, Guangdong, China

2. Department of Mechanical and Electrical Engineering, Dongguan Polytechnic, Dongguan 523808, Guangdong, China

3. Department of Chinese Medicine, Buddhist Dalin Tzu Chi General Hospital, Chiayi 622, Taiwan

4. Department of Mechanical Engineering, Hwa Hsia University of Technology, Taipei 235, Taiwan

Abstract

Characteristics of picosecond laser processing for poly(methyl methacrylate) (PMMA) are studied in this text. Poly(methyl methacrylate) (PMMA) can be applied to micro- or nano-scale electronic devices. Short-pulsed laser is usually used for noncontact processing of nanoscale patterning of poly(methyl methacrylate) (PMMA). This study considers optical energy of laser to be transferred into decomposition energy of poly(methyl methacrylate) (PMMA). Using the condition of the energy balance at the decomposition interface, the variation of the ablation rate with the logarithm of the laser fluence is calculated for poly(methyl methacrylate) (PMMA) and agrees with the measured data. This study also discusses parametric effects of poly(methyl methacrylate) (PMMA) on the variation of the ablation rate with the logarithm of the laser fluence.

Publisher

American Scientific Publishers

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering