Effect of Post-Deposition Annealing on the Al2O3/Si(100) Interface Properties
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Published:2014-05-01
Issue:5
Volume:6
Page:1032-1036
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ISSN:1947-2935
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Container-title:Science of Advanced Materials
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language:en
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Short-container-title:sci adv mater
Author:
Prasanna S.,Kumar A. K. Nanda,Rao G. Mohan,Jayakumar S.,Balasundaraprabhu R.
Publisher
American Scientific Publishers
Subject
General Materials Science