Continuous-Wave Laser Annealing of a Si/SiO<SUB>2</SUB> Superlattice: Effect of the Ambient Atmosphere and Exposure Period-Reference-Cited by-同舟云学术

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Continuous-Wave Laser Annealing of a Si/SiO₂ Superlattice: Effect of the Ambient Atmosphere and Exposure Period

Published:2014-05-01 Issue:5 Volume:6 Page:1000-1010
ISSN:1947-2935
Container-title:Science of Advanced Materials
language:en
Short-container-title:sci adv mater

Author:

Nikitin Timur,Kemell Marianna,Puukilainen Esa,Räsänen Markku,Ritala Mikko,Novikov Sergei,Khriachtchev Leonid

Publisher

American Scientific Publishers

Subject

General Materials Science

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Chapter 10 Silicon Nanocrystals in Silica: Optical Properties and Laser Annealing;Silicon Nanophotonics: Basic Principles, Present Status, and Perspectives, 2nd Ed;2016-08-08

2. Generation of silicon nanocrystals by damage free continuous wave laser annealing of substrate-bound SiOx films;Journal of Applied Physics;2015-09-28

3. Optical and Structural Properties of Si Nanocrystals in SiO2 Films;Nanomaterials;2015-04-22

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