Roughness Reduction of Large-Area High-Quality Thick Al Coatings for Large-Size Echelle Gratings by Chemical Mechanical Polishing
-
Published:2018-01-01
Issue:1
Volume:10
Page:69-74
-
ISSN:1941-4900
-
Container-title:Nanoscience and Nanotechnology Letters
-
language:en
-
Short-container-title:nanosci nanotechnol lett
Author:
Song Chi,Li Zizheng,Zhang Xin,Li Qiang,Yang Haigui,Gao Jinsong,Xing Scott
Publisher
American Scientific Publishers
Subject
General Materials Science