Numerical Simulation of 3-Dimensional Temperature Distribution in a Hot Filament Chemical Vapor Deposition Chamber
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Published:2019-11-01
Issue:11
Volume:11
Page:1587-1593
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ISSN:1947-2935
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Container-title:Science of Advanced Materials
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language:en
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Short-container-title:sci adv mater
Author:
Lee Yong Hee,Song Chang Weon,Kim Tae-Hee,Kim Kwang Ho,Choi Sooseok
Publisher
American Scientific Publishers
Subject
General Materials Science