Functionalization of Silicon Crystal Surface by Energetic Cluster Ion Bombardment
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Published:2012-12-01
Issue:12
Volume:12
Page:9136-9141
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j nanosci nanotechnol
Author:
Lavrentiev Vasily,Vacik Jiri,Dejneka Alexandr,Jastrabik Lubomir,Vorlicek Vladimir,Chvostova Dagmar,Potucek Zdenek,Narumi Kazumasa,Naramoto Hiroshi
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering