Two-Dimensional Fluid Simulation of Large-Scale, Capacitively-Coupled Plasma Discharge for Display Device Processes-Reference-Cited by-同舟云学术

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Two-Dimensional Fluid Simulation of Large-Scale, Capacitively-Coupled Plasma Discharge for Display Device Processes

Published:2017-11-01 Issue:11 Volume:17 Page:8411-8417
ISSN:1533-4880
Container-title:Journal of Nanoscience and Nanotechnology
language:en
Short-container-title:j nanosci nanotechnol

Author:

Jeong YoungDo¹,Lee Young Jun¹,Kwon Deuk-Chul²,Lee Sang-Jin³,Jeon Jae-Hong¹,Seo Jong Hyun⁴,Tong Lizhu⁵,Choe HeeHwan¹

Affiliation:

1. School of Electronics and Information Engineering, Korea Aerospace University, Goyang, 10540, Republic of Korea

2. Plasma Technology Research Center, National Fusion Research Institute, Gunsan, 54004, Republic of Korea

3. School of Advanced Materials Science and Engineering, SungKyunKwan University, Suwon, 16419, Republic of Korea

4. Department of Materials Engineering, Korea Aerospace University, Goyang, 10540, Republic of Korea

5. Keisoku Engineering System Co., Ltd., Chiyoda, Tokyo, 101-0047, Japan

Publisher

American Scientific Publishers

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Experimental and theoretical investigation of the control and balance of active sites on oxygen plasma-functionalized MoSe2 nanosheets for efficient hydrogen evolution reaction;Applied Catalysis B: Environmental;2021-07

2. Improvement of GaN plasma etching uniformity by optimizing the coil electrode with plasma simulation and experimental validation;Surface and Coatings Technology;2020-10

3. Concentric Split-Ring Resonator Microwave Microplasma Generation at Off-Resonant Frequencies;IEEE Transactions on Plasma Science;2020-04

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