Physical Patterning Performance in the Modified Layer Extraction Rule with an Image Sensor Device
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Published:2017-10-01
Issue:10
Volume:17
Page:7810-7813
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j nanosci nanotechnol
Author:
Choi Eunmi1,
Kang Keunwon1,
Cui Yinhua1,
Shim Ho Jae1,
Gao Yuan1,
Lee Kangwon1,
Kim Areum1,
Pyo Sung Gyu1
Affiliation:
1. School of Integrative Engineering, Chung-Ang University, Seoul 156-756, Korea
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering