AFM Anodization Lithography on Transparent Conductive Substrates

Abstract

In the present study, AFM anodization lithography was carried out on transparent conductive oxide substrates for the first time. ITO glasses were utilized as the transparent substrates. The surface of the ITO glass substrate was organically modified using the SAM (self-assembled monolayer) method. The wettability of the surfaces was controlled by changing the organic molecule used in the SAM method. An arbitrary nanopattern was fabricated using AFM anodization lithography on the organically modified ITO glass surface. Hydrophilic-hydrophobic nanopatterns on transparent substrates are potentially useful for optical observations of various substances adsorbed on nanostructures.