Optimization of Uncertainty Factors of Nanoelectronic Machine Tool Support and Performance Analysis of Machine Tool Accuracy
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Published:2018-08-01
Issue:8
Volume:13
Page:1204-1213
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ISSN:1555-130X
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Container-title:Journal of Nanoelectronics and Optoelectronics
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language:en
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Short-container-title:Journal of Nanoelectronics and Optoelectronics
Author:
Qi Yang,Gong Yadong,Li Pengfei,Liang Chunyou
Publisher
American Scientific Publishers
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials