Recessed Microstructures with Perfect Convex Corners for Accelerometers
Author:
Publisher
American Scientific Publishers
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. High speed silicon wet anisotropic etching for applications in bulk micromachining: a review;Micro and Nano Systems Letters;2021-02-22
2. High Speed Silicon Wet Bulk Micromachining of Si{111} in KOH Based Solution;2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP);2020-06
3. Modified TMAH based etchant for improved etching characteristics on Si{1 0 0} wafer;Journal of Micromechanics and Microengineering;2017-06-27
4. Simple to Complex Structures Using Wet Bulk Micromachining;Silicon Wet Bulk Micromachining for MEMS;2016-12-31
5. A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching;Micro and Nano Systems Letters;2015-05-27
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