Characteristics of Nanocrystalline Si:H Films Made by Inductively Coupled Plasma with Low-Inductance Antenna
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Published:2016-07-01
Issue:7
Volume:8
Page:539-543
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ISSN:1941-4900
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Container-title:Nanoscience and Nanotechnology Letters
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language:en
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Short-container-title:Nanosci Nanotechnol Lett
Author:
Wang W. C.,Yang H. H.,Cherng J. S.
Publisher
American Scientific Publishers
Subject
General Materials Science