Analysis of Etching Mechanism and Etched Slope Control of Silicon for Nanoimprinting Lithography
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Published:2011-07-01
Issue:7
Volume:11
Page:6523-6527
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:J. Nanosci. Nanotech.
Author:
Ham Y.-H.,Kim Y.,Baek K.-H.,Do L. M.,Kwon K.-H.,Park K.-B.
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering