Kinetics of the Formation of Titanium Oxynitride and Nitride Under the Action of VUV, Studied by Means of Ellipsometry
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Published:2011-09-01
Issue:9
Volume:11
Page:8343-8347
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:J. Nanosci. Nanotech.
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering