Remote Plasma Processing of Sapphire Substrates for Deposition of TiN and TiO2
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Published:2011-09-01
Issue:9
Volume:11
Page:7962-7968
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:J. Nanosci. Nanotech.
Author:
Lucovsky Gerald,Kim Jinwoo
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering