Atomic Layer Deposition of Ruthenium Films on Strontium Titanate-Reference-Cited by-同舟云学术

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Atomic Layer Deposition of Ruthenium Films on Strontium Titanate

Published:2011-09-01 Issue:9 Volume:11 Page:8378-8382
ISSN:1533-4880
Container-title:Journal of Nanoscience and Nanotechnology
language:en
Short-container-title:J. Nanosci. Nanotech.

Author:

Kukli Kaupo,Kemell Marianna,Lu Jun,Hultman Lars,Riedel Stefan,Sundqvist Jonas,Ritala Mikko,Leskelä Markku

Publisher

American Scientific Publishers

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Metallic Materials Deposition: Metal-Organic PrecursorsUpdate based on the original article by Charles H. Winter, Wenjun Zheng and Hani M. El-Kaderi,Encyclopedia of Inorganic ChemistrySecond Edition, © 2005, John Wiley & Sons, Ltd.;Encyclopedia of Inorganic and Bioinorganic Chemistry;2012-12-17

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