Lithography Simulation Basics and a Study on Impact of Lithographic Process Window on Gate and Path Delays
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Published:2008-12-01
Issue:3
Volume:4
Page:392-401
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ISSN:1546-1998
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Container-title:Journal of Low Power Electronics
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language:en
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Short-container-title:Journal of Low Power Electronics
Author:
Sreedhar Aswin,Kundu Sandip
Publisher
American Scientific Publishers
Subject
Electrical and Electronic Engineering