Physical Mechanism of Nitrogen Implantation Into Silicon Using Molecular Dynamics Simulation
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Published:2011-07-01
Issue:7
Volume:8
Page:1101-1105
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ISSN:1546-1955
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Container-title:Journal of Computational and Theoretical Nanoscience
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language:en
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Short-container-title:Jnl of Comp & Theo Nano
Author:
Fang Te-Hua,Chang Win-Jin,Chi Sung-Shui,Liao Jia-Hung
Publisher
American Scientific Publishers
Subject
Electrical and Electronic Engineering,Computational Mathematics,Condensed Matter Physics,General Materials Science,General Chemistry