Hydrogen/Argon Annealing on Al-Doped ZnO Films by Low Temperature Magnetron Direct Current Sputtering
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Published:2015-05-01
Issue:5
Volume:12
Page:745-750
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ISSN:1546-1955
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Container-title:Journal of Computational and Theoretical Nanoscience
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language:en
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Short-container-title:j comput theor nanosci
Author:
Shih Neng-Fu,Lin Chiun-Chih,Young San-Lin,Kung Chung-Yuan
Publisher
American Scientific Publishers
Subject
Electrical and Electronic Engineering,Computational Mathematics,Condensed Matter Physics,General Materials Science,General Chemistry