Theoretical Study of Atomic Level Understanding of the Reactive Ion Etching (RIE)
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Published:2012-08-01
Issue:8
Volume:9
Page:1067-1069
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ISSN:1546-1955
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Container-title:Journal of Computational and Theoretical Nanoscience
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language:en
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Short-container-title:j comput theor nanosci
Author:
Muhida Rifki,Rahman Md. Mamudur,Chowdhury Md. Sazzad Hossein,Setiyanto Henry,Zainuddin Hishamuddin,Zakaria Azmi Bin,Kasai Hideaki
Publisher
American Scientific Publishers
Subject
Electrical and Electronic Engineering,Computational Mathematics,Condensed Matter Physics,General Materials Science,General Chemistry