Coarse-Grain Simulations of the Polymer Filling Process in Nanolithography
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Published:2015-01-01
Issue:1
Volume:12
Page:77-81
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ISSN:1546-1955
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Container-title:Journal of Computational and Theoretical Nanoscience
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language:en
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Short-container-title:j comput theor nanosci
Author:
Wei Zhengying,Du Jun,Geng Qi,Li Shize,Tang Yiping
Publisher
American Scientific Publishers
Subject
Electrical and Electronic Engineering,Computational Mathematics,Condensed Matter Physics,General Materials Science,General Chemistry