Electrical Characterization of Charge Polarity in AlF3 Anti-Reflection Layers for Complementary Metal Oxide Semiconductor Image Sensors
-
Published:2018-09-01
Issue:9
Volume:18
Page:6005-6009
-
ISSN:1533-4880
-
Container-title:Journal of Nanoscience and Nanotechnology
-
language:en
-
Short-container-title:j nanosci nanotechnol
Author:
Hyeon Younghwan1,
Choi Pyungho1,
Kim Sangsub1,
Kim Minsoo1,
Lee Jeonghyun1,
Lim Kiwon1,
Kim Soonkon1,
Koo Kwangjun1,
Choi Byoungdeog1
Affiliation:
1. College of Information and Communication Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering