Enhancement of the Thermal Stability of TiNx Capping Layer on the Nickel Silicides
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Published:2011-04-01
Issue:2
Volume:3
Page:272-275
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ISSN:1941-4900
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Container-title:Nanoscience and Nanotechnology Letters
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language:en
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Short-container-title:Nanosci Nanotechnol Lett
Author:
Wu Chi-Ting,Lee Wen-Hsi,Chang Shih-Chieh,Cheng Yi-Lung,Wang Ying-Lang
Publisher
American Scientific Publishers
Subject
General Materials Science