Structural Optimizations of Silicon Based NMOSFETs with a Sunken STI Pattern by Using a Robust Stress Simulation Methodology
-
Published:2015-03-01
Issue:3
Volume:15
Page:2179-2184
-
ISSN:1533-4880
-
Container-title:Journal of Nanoscience and Nanotechnology
-
language:en
-
Short-container-title:j nanosci nanotechnol
Author:
Lee Chang-Chun,Liu Chuan-Hsi,Cheng Hsien-Chie,Deng Rong Hao
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering