Suppression of Cross Contamination in Multi-Layer Thin Film Prepared by Using Rotating Hexagonal Sputtering Cathode
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Published:2015-01-01
Issue:1
Volume:15
Page:475-479
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j nanosci nanotechnol
Author:
Park Se Yeon,Choi Bum Ho,Lee Jong Ho
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering