High Quality Al-Polar AlN Growth on (0001) Sapphire Using Polarity-Selective Thermal Etching by High Temperature Metalorganic Chemical Vapor Deposition
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Published:2015-11-01
Issue:11
Volume:15
Page:8401-8406
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j nanosci nanotechnol
Author:
Jeon Minhwan,Kim Jinwan,Lee Kyungjae,Eom Daeyong,Pyeon Jaedo,Heo Cheon,Nam Okhyun
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering