Simulation for Large-Area, Inductively-Coupled Plasma Systems Using an Ar/Cl2 Gas Mixture
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Published:2015-11-01
Issue:11
Volume:15
Page:8557-8565
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:j nanosci nanotechnol
Author:
Oh Seon-Geun,Lee Young-Jun,Jeon Jae-Hong,Kim Young-Jin,Seo Jong-Hyun,Choe Hee-Hwan
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering