1. The National and Local Joint Engineering Laboratory of Internet Technology on Mine, Research Center of Internet of Things, China University of Mining and Technology, Quanshan District, Xuzhou 221008, P. R. China
2. National Key Laboratory of Micro/Nano Fabrication Technology, Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University,
Minhang District, Shanghai 200240, P. R. China