Quantitative Analysis of Arsenic Doping Concentration in Silicon Using Scanning Transmission Electron Microscopy/Energy Dispersive X-ray Spectrometry
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Published:2018-02-01
Issue:2
Volume:10
Page:293-296
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ISSN:1947-2935
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Container-title:Science of Advanced Materials
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language:en
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Short-container-title:sci adv mater
Author:
Lee Sungho,Kang Jonghyuk,Lee Chilgee,Yang Cheol-Woong
Publisher
American Scientific Publishers
Subject
General Materials Science