The Fabrication of a Cylindrical Nano Mold Based on UV Photolithography

Abstract

The field of nanotechnology is predicted to lead to breakthroughs in many industrial fields. However, inadequate capability for mass production is a large hurdle in the advancement of this industry. To overcome the shortfall in production of nanotechnological devices, we designed a cylindrical nano mold used in the roll-to-roll process with a large surface area to improve production efficiency. The nano structure was fabricated using the UV-based phase shift edge lithography process and duplicated onto a metal plate. The nano patterned metal plate was rolled onto a cylindrical core to complete the cylindrical nano mold. We confirmed the processing ability of the mold by experimentally conducting the nano imprinting process and analyzing the results.