Nanoparticle Formation Mechanism in CVD Reactor with Ionization of Source Vapor-Reference-Cited by-同舟云学术

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Nanoparticle Formation Mechanism in CVD Reactor with Ionization of Source Vapor

Published:2003-04 Issue:1/2 Volume:5 Page:31-37
ISSN:1388-0764
Container-title:Journal of Nanoparticle Research
language:en
Short-container-title:Journal of Nanoparticle Research

Author:

Adachi Motoaki,Tsukui Shigeki,Okuyama Kikuo

Publisher

Springer Science and Business Media LLC

Subject

Condensed Matter Physics,General Materials Science,Modelling and Simulation,General Chemistry,Atomic and Molecular Physics, and Optics,Bioengineering

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