Effect of in-situ cleaning temperature on the structural quality of homoepitaxial film on Si substrate
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Published:2004-11
Issue:22
Volume:39
Page:6861-6862
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ISSN:0022-2461
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Container-title:Journal of Materials Science
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language:en
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Short-container-title:Journal of Materials Science
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science