Carbon nanotubes grown by plasma enhanced chemical vapor deposition of acetylene in the presence of water vapor
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Published:2024-02-11
Issue:1
Volume:23
Page:
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ISSN:1657-4583
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Container-title:Revista UIS Ingenierías
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language:
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Short-container-title:Rev UIS ing
Author:
Sancho-Tapia Júlia,
Bertran-Sierra EnricORCID,
Ospina RogelioORCID
Abstract
Carbon nanotubes can be synthesized using various techniques. This work aims to study the experimental process of growing carbon nanotubes via plasma-enhanced chemical vapor deposition (PECVD). Additionally, the study aims to calibrate the reactor and develop a LabVIEW code to introduce water into the process, enabling a water-assisted PECVD procedure. The obtained samples are evaluated through the analysis of SEM images and Raman spectra.
Publisher
Universidad Industrial de Santander