Analysis of Flow Inside a CVD Chamber with Wafer Batch Structure
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Published:2018-01-31
Issue:1
Volume:42
Page:35-40
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ISSN:1226-4881
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Container-title:Transactions of the Korean Society of Mechanical Engineers - B
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language:en
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Short-container-title:KSME-B
Author:
Kang Seung-Hwan,Lee Jae Won,Ko Han Seo
Publisher
The Korean Society of Mechanical Engineers
Subject
Mechanical Engineering