Study on the Characteristics of Thermal Plasma-Catalysis Scrubber Using Fluidized Bed for CF₄ Removal
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Published:2022-01-31
Issue:1
Volume:46
Page:19-27
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ISSN:1226-4881
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Container-title:Transactions of the Korean Society of Mechanical Engineers - B
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language:en
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Short-container-title:KSME-B
Author:
Cho Donghyun,Jo Sungkwon,Kang Hongjae,Kang Woo-Seok
Publisher
The Korean Society of Mechanical Engineers
Subject
Mechanical Engineering