Effect of Chemical Mechanical Cleaning(CMC) on Particle Removal in Post-Cu CMP Cleaning
-
Published:2009-10-01
Issue:10
Volume:33
Page:1023-1028
-
ISSN:1226-4873
-
Container-title:Transactions of the Korean Society of Mechanical Engineers A
-
language:en
-
Short-container-title:Transactions of the Korean Society of Mechanical Engineers A
Author:
Kim Young-Min,Cho Han-Chul,Jeong Hae-Do
Publisher
The Korean Society of Mechanical Engineers
Subject
Mechanical Engineering